Ph.D., Professor Emeritus at North Carolina State
University, USA.
Previously he was Director of Advanced Semiconductor Technology at
MCNC and manager of the Exploratory Fabrication Technology Area at
the IBM T.J. Watson Research Center. His research interests include
deep submicron device and process integration, device scaling,
thin-dielectric reliability, shallow junctions, and interconnection
technology and materials.
Professor Osburn has received the T.D. Callinan Award from the
Dielectrics and Insulation Division of the Electrochemical
Society,the Maurice Simpson Award of the Institute of Environmental
Sciences, and the Electronics Division Award of the Electrochemical
Society. He is a fellow of the Electrochemical Society and of the
IEEE, past Chairman of the Electronics Division and past President
of the Electrochemical Society.
Professor Osburn has been a member of the CEI-Europe Faculty
since 1987.
Course #16
CMOS/BiCMOS Process Integration and Engineering