Professor of Electrical Engineering and Computer Science
at the University of Michigan since 1990.
From 1981 to 1989, she was with Lincoln Laboratory, Massachusetts
Institute of Technology working on submicrometer technology for
microelectronic applications. Her research interests include
nano-fabrication technology, dry etching, dry deposition, and
surface modifications for microelectromechanical, microelectronic,
and optical devices. She received her Ph.D. in Electrical
Engineering and Computer Science from Princeton University. She has
over 300 technical papers, book chapters, and presentations.
Professor Pang has served as conference organizer for American
Vacuum Society, Electrochemical Society, Electronic Materials
Conference, IEEE, International Microprocesses and Nanotechnology
Conference, International Symposium on Electron, Ion, and Photon
Beam Technology and Nanofabrication, Material Research Society, and
SPIE. She was the editor and author for 16 books, journals, and
conference proceedings. She has taught short courses on
microfabrication technology for microelectronic manufacturing and
microelectro-mechanical systems at AVS, CEI, and SPIE. She is
Fellow of IEEE, ECS, and AVS.
Professor Pang has been a member of the CEI-Europe Faculty since
year 2000.
Course #05
Current and Next Generation Lithography - Fundamentals and
Applications
Course #37
Micro Fabrication Technology for MEMS and NEMS