Pang, Stella W. - CEI-Europe

Pang, Stella W.

Professor of Electrical Engineering and Computer Science at the University of Michigan from 1990-2011 and Chair Professor in the Department of Electronic Engineering at City University of Hong Kong since 2012.

She serves as the director of Center for Biosystems, Neuroscience, and Nanotechnology at City University of Hong Kong. From 1981 to 1989, she was with Lincoln Laboratory, Massachusetts Institute of Technology working on submicrometer technology for microelectronic applications. Her research interests include nanofabrication technology for microelectromechanical, biomedical, microelectronic, and optical devices. She received her Ph.D. in Electrical Engineering and Computer Science from Princeton University. She has over 400 technical papers, book chapters, and presentations; and 9 patents granted in nanotechnology and microsystems.

Professor Pang has served as conference organizer for American Vacuum Society, Electrochemical Society, Electronic Materials Conference, IEEE, International Microprocesses and Nanotechnology Conference, International Symposium on Electron, Ion, and Photon Beam Technology and Nanofabrication, Material Research Society, and SPIE. She was the editor and author for 16 books, journals, and conference proceedings. She has taught short courses on microfabrication and nanoimprint technology for microelectronic manufacturing and microelectromechanical systems at AVS, CEI, MNE, and SPIE. She is Fellow of IEEE, ECS, and AVS.

Professor Pang has been a member of the CEI-Europe Faculty since year 2000.

Course #05 Current and Next Generation Lithography - Fundamentals and Applications

Course #37 Micro Fabrication Technology for MEMS and NEMS

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