ELENA- Project Low energy ELEctron driven chemistry for the advantage of emerging NAno-fabrication methods

Excellent collaboration with Tescan ME for the 2nd Technical Training School within the ELENA project. 15 PhD students from Iceland, Czech Republic, Germany, Norway, Switzerland, Belgium, Austria, UK and,The Netherlands, together with supervisors also from USA, France and Poland, are funded from the EU Horizon 2020 Research and Innovation programme under the Marie Sklodowska-Curie Action. FEBID, precursors, electrons, Electron and Ion Beam Nanolithography are discussed together with SEM Detection Systems.