From December 1980 until May 2005, H. van Zeijl worked as an engineer at Delft University of Technology, initially at the Reactor Institute Delft, focusing on measurement systems for neutron diffraction and instrumental neutron activation analysis. In October 1986, he joined the faculty of Electrical Engineering, Mathematics and Computer Science (EEMCS), working on microelectronics and MEMS fabrication in silicon technology. He was actively involved in constructing cleanrooms and installing equipment at the Delft Institute for Microelectronics and Submicron Technology (DIMES). After the completion of the DIMES cleanrooms, he became responsible for photomasks and optical lithography equipment and processes, while also contributing to the development of bipolar processes, high-frequency SiGe bipolar transistors, and MEMS devices. In 2000, he developed a 5-mask BiCMOS process for educational purposes, which is still in use today.
In addition to his cleanroom responsibilities, H. van Zeijl conducted PhD research on back-contact bipolar transistors, completing his thesis in 2005. Since then, he has been a senior process engineer in various research projects at TU Delft and external companies, including MEMS, 3D integration, packaging, microsystem reliability, and Solid State Lighting integration.
Since 2007, H. van Zeijl has been a part-time lecturer and advisor for master and PhD students at ECTM and a part-time senior process engineer at DIMES (renamed Else Kooi Laboratories in 2015). He has developed several five-day courses in lithography, IC technology, and MEMS technology, delivered more than forty times in Delft, China, and Vietnam. From mid-2019 to mid-2021, he was involved in the Chip Integration Technology Center (CITC) in Nijmegen as scientific director.
Throughout his career, H. van Zeijl has built extensive experience in front-end silicon technology, MEMS, and packaging technologies. He is the (co-)author of more than 80 technical articles and several patents.
Dr. van Zeijl has been a member of the Continuing Education Institute-Europe faculty since 2025.
Course #098 "Applied I-Line Lithography."