Overview
In this series of lectures, we will demonstrate the advantages of SOI technology for RF CMOS integration as well as for building thin film sensors on thin dielectric membrane and three-dimensional Micro-Electro-Mechanical Sensors (MEMS) and actuators co-integrated with their associated SOI CMOS circuitry. SOI is for sure today one of the most promising technologies for meeting the requirements of More than Moore Roadmap.
Course 038 Silicon-on-Insulator Technologies from Microelectronics to MEMS
Instructor
Professor Jean-Pierre Raskin
Professor at the Institute of Information and Communication Technologies, Electronics and Applied Mathematics (ICTEAM), Electrical Engineering Department (ELEN), Université Catholique de Louvain, Belgium
Professor Raskin has been a member of the Continuing Education Institute-Europe faculty since 2018.